Inventor
YANG ZONG-YOU
TW5 patents
Patents
5 patentsUS11803129B2Oct 31, 2023
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations69
US12360464B2Jul 15, 2025
Lithography system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12164235B2Dec 10, 2024
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US11782350B2Oct 10, 2023
Lithography system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11520243B2Dec 6, 2022
Lithography system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59