Inventor
Sun cheng-wei
TW6 patents
⚠️ This page may combine multiple inventors who share the name “Sun cheng-wei”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS11803129B2Oct 31, 2023
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations69
US12360464B2Jul 15, 2025
Lithography system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12164235B2Dec 10, 2024
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US11782350B2Oct 10, 2023
Lithography system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11520243B2Dec 6, 2022
Lithography system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59