Inventor
SASAKI NOBUTAKA
JP13 patents
⚠️ This page may combine multiple inventors who share the name “SASAKI NOBUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS10249478B2Apr 2, 2019
Substrate processing apparatus
TOKYO ELECTRON LTD2 citations72
US10264630B2Apr 16, 2019
Plasma processing apparatus and method for processing object
TOKYO ELECTRON LTD2 citations69
US12354849B2Jul 8, 2025
Plasma processing apparatus
TOKYO ELECTRON LTD1 citations61
US12261028B2Mar 25, 2025
Plasma processing apparatus
TOKYO ELECTRON LTD1 citations61
US12469738B2Nov 11, 2025
Substrate support, plasma processing apparatus, and ring replacement method
TOKYO ELECTRON LTD0 citations60
US12191119B2Jan 7, 2025
Substrate processing apparatus and gas switching method for substrate processing apparatus
TOKYO ELECTRON LTD0 citations50
US12165893B2Dec 10, 2024
Substrate processing system and transfer method
TOKYO ELECTRON LTD0 citations50
US12027346B2Jul 2, 2024
Substrate processing apparatus and method of driving relay member
TOKYO ELECTRON LTD0 citations50
US9818582B2Nov 14, 2017
Plasma processing method
TOKYO ELECTRON LTD1 citations48
US12165854B2Dec 10, 2024
Substrate support and substrate processing apparatus
TOKYO ELECTRON LTD0 citations46
US12308221B2May 20, 2025
Substrate processing system and method for installing edge ring
TOKYO ELECTRON LTD0 citations43