Inventor

ZHANG WESLEY W

US4 patents

⚠️ This page may combine multiple inventors who share the name “ZHANG WESLEY W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US4819167AApr 4, 1989

System and method for detecting the center of an integrated circuit wafer

APPLIED MATERIALS INC279 citations97

US4927485AMay 22, 1990

Laser interferometer system for monitoring and controlling IC processing

APPLIED MATERIALS INC83 citations94

CHANG YU

2 patents

US8114256B2Feb 14, 2012

Control of arbitrary scan path of a rotating magnetron

CHANG YU6 citations77

US8721847B2May 13, 2014

Homing of arbitrary scan path of a rotating magnetron

CHANG YU4 citations66