Inventor
TODOROKI SATORU
JP5 patents
Patents
5 patentsUS5883437AMar 16, 1999
Method and apparatus for inspection and correction of wiring of electronic circuit and for manufacture thereof
HITACHI LTD175 citations97
US5633175AMay 27, 1997
Process for stripping photoresist while producing liquid crystal display device
HITACHI LTD8 citations73
US5272360ADec 21, 1993
Thin film transistor having enhance stability in electrical characteristics
HITACHI LTD11 citations73
US5399202AMar 21, 1995
Resist-peeling liquid and process for peeling a resist using the same
HITACHI LTD6 citations62
US5243259ASep 7, 1993
Microwave plasma processing apparatus
HITACHI LTD2 citations61