Inventor

SHIUE YEONG-RUEY

TW2 patents

Patents

2 patents

US5776833AJul 7, 1998

Method for forming metal plug

MOSEL VITELIC INC32 citations89

US5963830AOct 5, 1999

Method of forming a TiN/W barrier layer for a hot Al plug

MOSEL VITELIC INC8 citations71