Inventor
RUEGSEGGER STEVEN M
US5 patents
⚠️ This page may combine multiple inventors who share the name “RUEGSEGGER STEVEN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS6482660B2Nov 19, 2002
Effective channel length control using ion implant feed forward
IBM55 citations94
US6926843B2Aug 9, 2005
Etching of hard masks
IBM45 citations91
US6697697B2Feb 24, 2004
Effective channel length control using ion implant feed forward
IBM9 citations71
US6917841B2Jul 12, 2005
Part number inhibit control
IBM3 citations54