Inventor

HEYDER ROGER V

US3 patents

Patents

3 patents

US6450750B1Sep 17, 2002

Multiple loadlock system

APPLIED MATERIALS INC70 citations93

US6034000AMar 7, 2000

Multiple loadlock system

APPLIED MATERIALS INC71 citations93

US6506693B2Jan 14, 2003

Multiple loadlock system

APPLIED MATERIALS INC16 citations90