Inventor

GREEN GORDON ROBERT

GB7 patents

⚠️ This page may combine multiple inventors who share the name “GREEN GORDON ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TRIKON TECHNOLOGIES LTD

2 patents

US6709556B2Mar 23, 2004

Plasma processing apparatus

TRIKON TECHNOLOGIES LTD7 citations71

US6929724B2Aug 16, 2005

Shutter

TRIKON TECHNOLOGIES LTD5 citations58

MATERIALS SOLUTIONS

1 patent

US8021138B2Sep 20, 2011

Rotating build plate

MATERIALS SOLUTIONS118 citations94

TRIKON EQUIP LTD

1 patent

US6188563B1Feb 13, 2001

Platen for semiconductor workpieces

TRIKON EQUIP LTD18 citations90

TRIKON HOLDINGS LTD

1 patent

US6533868B1Mar 18, 2003

Deposition apparatus

TRIKON HOLDINGS LTD21 citations83

PROUDFOOT GARY

1 patent

US8425741B2Apr 23, 2013

Ion deposition apparatus having rotatable carousel for supporting a plurality of targets

PROUDFOOT GARY1 citations40

AVIZA TECHNOLOGY LTD

1 patent

US8354652B2Jan 15, 2013

Ion source including separate support systems for accelerator grids

AVIZA TECHNOLOGY LTD0 citations37