Inventor

AKGERMAN BORA

US3 patents

Patents

3 patents

US7615120B2Nov 10, 2009

Pulsed mass flow delivery system and method

MKS INSTR INC64 citations95

US7829353B2Nov 9, 2010

Pulsed mass flow delivery system and method

MKS INSTR INC18 citations90

US7628860B2Dec 8, 2009

Pulsed mass flow delivery system and method

MKS INSTR INC29 citations90