Inventor

FAN MING-YU

TW9 patents

⚠️ This page may combine multiple inventors who share the name “FAN MING-YU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TSEN ANDY

2 patents

US8108060B2Jan 31, 2012

System and method for implementing a wafer acceptance test (“WAT”) advanced process control (“APC”) with novel sampling policy and architecture

TSEN ANDY25 citations90

US8229588B2Jul 24, 2012

Method and system for tuning advanced process control parameters

TSEN ANDY32 citations89

TAIWAN SEMICONDUCTOR MFG CO LTD

2 patents

US10113233B2Oct 30, 2018

Multi-zone temperature control for semiconductor wafer

TAIWAN SEMICONDUCTOR MFG CO LTD6 citations83

US9023664B2May 5, 2015

Multi-zone temperature control for semiconductor wafer

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations62

TAIWAN SEMICONDUCTOR MFG

2 patents

US6998629B2Feb 14, 2006

Reticle position detection system

TAIWAN SEMICONDUCTOR MFG8 citations72

US7977655B2Jul 12, 2011

Method and system of monitoring E-beam overlay and providing advanced process control

TAIWAN SEMICONDUCTOR MFG0 citations51

CHANG CHUN-LIN

1 patent

US8404572B2Mar 26, 2013

Multi-zone temperature control for semiconductor wafer

CHANG CHUN-LIN40 citations95

MICROSOFT TECHNOLOGY LICENSING LLC

1 patent

US11250433B2Feb 15, 2022

Using semi-supervised label procreation to train a risk determination model

MICROSOFT TECHNOLOGY LICENSING LLC1 citations56

FEI WANG JO

1 patent

US8392009B2Mar 5, 2013

Advanced process control with novel sampling policy

FEI WANG JO4 citations54