Inventor

SOULET AXEL

US3 patents

⚠️ This page may combine multiple inventors who share the name “SOULET AXEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FANJAT NORBERT

2 patents

US8235580B2Aug 7, 2012

Reclaim function for semiconductor processing systems

FANJAT NORBERT12 citations76

US8591095B2Nov 26, 2013

Reclaim function for semiconductor processing system

FANJAT NORBERT4 citations57

DONIAT FRANCOIS

1 patent

US8191397B2Jun 5, 2012

Methods for checking and calibrating concentration sensors in a semiconductor processing chamber

DONIAT FRANCOIS2 citations52