Inventor
SAOPRASEUTH PONCE
US6 patents
⚠️ This page may combine multiple inventors who share the name “SAOPRASEUTH PONCE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
5 patentsUS6562700B1May 13, 2003
Process for removal of resist mask over low k carbon-doped silicon oxide dielectric material of an integrated circuit structure, and removal of residues from via etch and resist mask removal
LSI LOGIC CORP57 citations91
US6566186B1May 20, 2003
Capacitor with stoichiometrically adjusted dielectric and method of fabricating same
LSI LOGIC CORP39 citations89
US6583026B1Jun 24, 2003
Process for forming a low k carbon-doped silicon oxide dielectric material on an integrated circuit structure
LSI LOGIC CORP7 citations73
US6562735B1May 13, 2003
Control of reaction rate in formation of low k carbon-containing silicon oxide dielectric material using organosilane, unsubstituted silane, and hydrogen peroxide reactants
LSI LOGIC CORP10 citations72
US6951787B2Oct 4, 2005
Capacitor with stoichiometrically adjusted dielectric and method of fabricating same
LSI LOGIC CORP7 citations70