Inventor

GAYLORD RICHARD H

US2 patents

⚠️ This page may combine multiple inventors who share the name “GAYLORD RICHARD H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US9673038B2Jun 6, 2017

Gas phase oxide removal and passivation of germanium-containing semiconductors and compound semiconductors

TOKYO ELECTRON LTD0 citations39

GAYLORD RICHARD H

1 patent

US8664012B2Mar 4, 2014

Combined silicon oxide etch and contamination removal process

GAYLORD RICHARD H1 citations34