Inventor
Chen chun yan
TW10 patents
Patents
10 patentsUS11615946B2Mar 28, 2023
Baffle plate for controlling wafer uniformity and methods for making the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US10964653B2Mar 30, 2021
Method of forming a semiconductor device comprising top conductive pads
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations65
US12463016B2Nov 4, 2025
Devices and methods for controlling wafer uniformity in plasma-based process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12412734B2Sep 9, 2025
Baffle plate for controlling wafer uniformity and methods for making the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11769652B2Sep 26, 2023
Devices and methods for controlling wafer uniformity in plasma-based process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12202094B2Jan 21, 2025
System and method for chemical mechanical polishing pad replacement
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12525421B2Jan 13, 2026
Ion source head and ion source head curved liner, deflector, or repeller
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US12237179B2Feb 25, 2025
Fittings for wafer cleaning systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US9391113B2Jul 12, 2016
Image-sensor device structure and method of manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations46
US12564091B2Feb 24, 2026
Silicon fragment defect reduction in grinding process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45