Inventor
MANABE EIJI
JP3 patents
Patents
3 patentsUS9343349B2May 17, 2016
Substrate holding apparatus and substrate holding method
TOKYO ELECTRON LTD4 citations70
US12451374B2Oct 21, 2025
Bonding system and inspection method of inspecting combined substrate
TOKYO ELECTRON LTD0 citations55
US11791182B2Oct 17, 2023
Measuring method and measuring device
TOKYO ELECTRON LTD0 citations43