Inventor
DOW DANIEL B
US7 patents
Patents
7 patentsUS6319420B1Nov 20, 2001
Method and apparatus for electrically endpointing a chemical-mechanical planarization process
MICRON TECHNOLOGY INC123 citations97
US6190494B1Feb 20, 2001
Method and apparatus for electrically endpointing a chemical-mechanical planarization process
MICRON TECHNOLOGY INC247 citations97
US6358129B2Mar 19, 2002
Backing members and planarizing machines for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies, and methods of making and using such backing members
MICRON TECHNOLOGY INC131 citations96
US6153532ANov 28, 2000
Methods and apparatuses for removing material from discrete areas on a semiconductor wafer
MICRON TECHNOLOGY INC23 citations92
US6375792B1Apr 23, 2002
Methods and apparatuses for removing material from discrete areas on a semiconductor wafer
MICRON TECHNOLOGY INC5 citations73
US6737356B1May 18, 2004
Method of fabricating a semiconductor work object
MICRON TECHNOLOGY INC8 citations72
US6376390B1Apr 23, 2002
Methods and apparatuses for removing material from discrete areas on a semiconductor wafer
MICRON TECHNOLOGY INC0 citations51