Inventor

WERIJ HENRI GERARD CATO

NL3 patents

Patents

3 patents

US6781673B2Aug 24, 2004

Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby

ASML NETHERLANDS BV56 citations94

US6459472B1Oct 1, 2002

Lithographic device

ASML NETHERLANDS BV87 citations93

US7202934B2Apr 10, 2007

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV4 citations61