Inventor
CERNUSCA STEFAN
AT5 patents
⚠️ This page may combine multiple inventors who share the name “CERNUSCA STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PLATZGUMMER ELMAR
3 patentsUS8304749B2Nov 6, 2012
Charged-particle exposure apparatus with electrostatic zone plate
PLATZGUMMER ELMAR25 citations91
US8258488B2Sep 4, 2012
Compensation of dose inhomogeneity and image distortion
PLATZGUMMER ELMAR28 citations91
US8278635B2Oct 2, 2012
Global point spreading function in multi-beam patterning
PLATZGUMMER ELMAR5 citations61