Inventor

NISHIDA HIROAKI

JP6 patents

⚠️ This page may combine multiple inventors who share the name “NISHIDA HIROAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

4 patents

US11396082B2Jul 26, 2022

Substrate holding device and substrate processing apparatus including the same

EBARA CORP3 citations68

US11059137B2Jul 13, 2021

Tool set for use in position adjustment of positioning pins

EBARA CORP3 citations68

US9378997B2Jun 28, 2016

Substrate holding mechanism, substrate transporting device, and semiconductor manufacturing apparatus

EBARA CORP2 citations57

US9236285B2Jan 12, 2016

Movable range adjusting mechanism for workpiece conveying device

EBARA CORP0 citations36

TORII HIROOMI

2 patents

US8550875B2Oct 8, 2013

Method of operating substrate processing apparatus and substrate processing apparatus

TORII HIROOMI0 citations42

US8202139B2Jun 19, 2012

Method of operating substrate processing apparatus and substrate processing apparatus

TORII HIROOMI0 citations42