Inventor
POMAREDE CHRISTOPHE
DE9 patents
⚠️ This page may combine multiple inventors who share the name “POMAREDE CHRISTOPHE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
6 patentsUS6960537B2Nov 1, 2005
Incorporation of nitrogen into high k dielectric film
ASM INC61 citations95
US7022613B2Apr 4, 2006
Reduced cross-contamination between chambers in a semiconductor processing tool
ASM INC17 citations89
US6825051B2Nov 30, 2004
Plasma etch resistant coating and process
ASM INC21 citations85
US7405453B2Jul 29, 2008
Incorporation of nitrogen into high k dielectric film
ASM INC9 citations83
US6797617B2Sep 28, 2004
Reduced cross-contamination between chambers in a semiconductor processing tool
ASM INC13 citations81
US7569284B2Aug 4, 2009
Incorporation of nitrogen into high k dielectric film
ASM INC6 citations73