Inventor

HENKE WOLFGANG

DE8 patents

⚠️ This page may combine multiple inventors who share the name “HENKE WOLFGANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

4 patents

US9971251B2May 15, 2018

Lithography system and a machine learning controller for such a lithography system

ASML NETHERLANDS BV2 citations71

US9715181B2Jul 25, 2017

Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product

ASML NETHERLANDS BV3 citations71

US9507279B2Nov 29, 2016

Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product

ASML NETHERLANDS BV2 citations59

US10078273B2Sep 18, 2018

Lithographic apparatus with data processing apparatus

ASML NETHERLANDS BV0 citations38

INFINEON TECHNOLOGIES AG

2 patents

US6620559B2Sep 16, 2003

Photomask, method of lithographically structuring a photoresist layer with the photomask, and method of producing magnetic memory elements

INFINEON TECHNOLOGIES AG3 citations59

US7462426B2Dec 9, 2008

Method for producing a phase mask

INFINEON TECHNOLOGIES AG0 citations40

QIMONDA AG

1 patent

US7727837B2Jun 1, 2010

Method of producing an integrated circuit having a capacitor with a supporting layer

QIMONDA AG19 citations92

HABETS BORIS

1 patent

US8440475B2May 14, 2013

Alignment calculation

HABETS BORIS7 citations80