Inventor

LIEBAUG BJÖRN

DE2 patents

Patents

2 patents

US11448968B2Sep 20, 2022

Beam-forming and illuminating system for a lithography system, lithography system, and method

ZEISS CARL SMT GMBH0 citations45

US10831114B2Nov 10, 2020

Lithography apparatus and method

ZEISS CARL SMT GMBH0 citations42