Inventor
YANO HIROHIDE
JP5 patents
Patents
5 patentsUS9616544B2Apr 11, 2017
Wafer inspection method and grinding and polishing apparatus
DISCO CORP10 citations80
US11474143B2Oct 18, 2022
Testing apparatus
DISCO CORP2 citations69
US9953407B2Apr 24, 2018
Wafer inspection method and wafer inspection apparatus
DISCO CORP3 citations65
US12298126B2May 13, 2025
Operation accuracy measuring method
DISCO CORP0 citations61
US9881828B2Jan 30, 2018
Wafer processing method
DISCO CORP0 citations39