Inventor
VAN WIJK ROBERT JAN
NL6 patents
⚠️ This page may combine multiple inventors who share the name “VAN WIJK ROBERT JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS7148494B2Dec 12, 2006
Level sensor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations72
US6987555B2Jan 17, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV5 citations60
US11099485B2Aug 24, 2021
Maintaining a set of process fingerprints
ASML NETHERLANDS BV0 citations57
US11520238B2Dec 6, 2022
Optimizing an apparatus for multi-stage processing of product units
ASML NETHERLANDS BV0 citations56
US11150562B2Oct 19, 2021
Optimizing an apparatus for multi-stage processing of product units
ASML NETHERLANDS BV0 citations56