Inventor
CHEN TZU-CHAO
US4 patents
Patents
4 patentsUS11803127B2Oct 31, 2023
Method for determining root cause affecting yield in a semiconductor manufacturing process
ASML NETHERLANDS BV3 citations71
US12315175B2May 27, 2025
Method in the manufacturing process of a device, a non-transitory computer-readable medium and a system configured to perform the method
ASML NETHERLANDS BV0 citations59
US11520238B2Dec 6, 2022
Optimizing an apparatus for multi-stage processing of product units
ASML NETHERLANDS BV0 citations56
US11150562B2Oct 19, 2021
Optimizing an apparatus for multi-stage processing of product units
ASML NETHERLANDS BV0 citations56