Inventor
KIM STEVEN H
US8 patents
⚠️ This page may combine multiple inventors who share the name “KIM STEVEN H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS7780789B2Aug 24, 2010
Vortex chamber lids for atomic layer deposition
APPLIED MATERIALS INC458 citations98
US7183227B1Feb 27, 2007
Use of enhanced turbomolecular pump for gapfill deposition using high flows of low-mass fluent gas
APPLIED MATERIALS INC15 citations83
US7846845B2Dec 7, 2010
Integrated method for removal of halogen residues from etched substrates in a processing system
APPLIED MATERIALS INC16 citations82
US7651587B2Jan 26, 2010
Two-piece dome with separate RF coils for inductively coupled plasma reactors
APPLIED MATERIALS INC8 citations82
US7655571B2Feb 2, 2010
Integrated method and apparatus for efficient removal of halogen residues from etched substrates
APPLIED MATERIALS INC11 citations80
US7811411B2Oct 12, 2010
Thermal management of inductively coupled plasma reactors
APPLIED MATERIALS INC2 citations61