Inventor
BUCHNER REINHOLD
DE6 patents
Patents
6 patentsUS5877034AMar 2, 1999
Method of making a three-dimensional integrated circuit
FRAUNHOFER GES FORSCHUNG266 citations98
US5563084AOct 8, 1996
Method of making a three-dimensional integrated circuit
FRAUNHOFER GES FORSCHUNG589 citations98
US5766984AJun 16, 1998
Method of making a vertical integrated circuit
FRAUNHOFER GES FORSCHUNG74 citations95
US5279703AJan 18, 1994
Process for the thin etching of substrates
FRAUNHOFER GES FORSCHUNG30 citations91
US6284627B1Sep 4, 2001
Method for wiring semi-conductor components in order to prevent product piracy and manipulation, semi-conductors component made according to this method and use of said semi-conductor component in a chip card
FRAUNHOFER GES FORSCHUNG9 citations73
US6664132B1Dec 16, 2003
Method for producing three-dimensional circuits
FRAUNHOFER GES FORSCHUNG6 citations62