Inventor
ZHANG JONATHAN WEIGUO
US7 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG JONATHAN WEIGUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BLUE29 LLC
5 patentsUS6913651B2Jul 5, 2005
Apparatus and method for electroless deposition of materials on semiconductor substrates
BLUE29 LLC67 citations97
US6908512B2Jun 21, 2005
Temperature-controlled substrate holder for processing in fluids
BLUE29 LLC34 citations92
US6846519B2Jan 25, 2005
Method and apparatus for electroless deposition with temperature-controlled chuck
BLUE29 LLC13 citations83
US6935638B2Aug 30, 2005
Universal substrate holder for treating objects in fluids
BLUE29 LLC18 citations82
US6939403B2Sep 6, 2005
Spatially-arranged chemical processing station
BLUE29 LLC10 citations73