Inventor
LANE MICHAEL WAYNE
US4 patents
Patents
4 patentsUS7276787B2Oct 2, 2007
Silicon chip carrier with conductive through-vias and method for fabricating same
IBM124 citations96
US7084479B2Aug 1, 2006
Line level air gaps
IBM27 citations90
US7357977B2Apr 15, 2008
Ultralow dielectric constant layer with controlled biaxial stress
IBM10 citations83
US7825516B2Nov 2, 2010
Formation of aligned capped metal lines and interconnections in multilevel semiconductor structures
IBM9 citations78