Inventor

TYBERG CHRISTY SENSENICH

US3 patents

Patents

3 patents

US7084479B2Aug 1, 2006

Line level air gaps

IBM27 citations90

US6537908B2Mar 25, 2003

Method for dual-damascence patterning of low-k interconnects using spin-on distributed hardmask

IBM16 citations82

US6724069B2Apr 20, 2004

Spin-on cap layer, and semiconductor device containing same

IBM12 citations73