Inventor
BERTSCHE KIRK J
US14 patents
⚠️ This page may combine multiple inventors who share the name “BERTSCHE KIRK J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
10 patentsUS7315022B1Jan 1, 2008
High-speed electron beam inspection
KLA TENCOR TECH CORP59 citations98
US6870172B1Mar 22, 2005
Maskless reflection electron beam projection lithography
KLA TENCOR TECH CORP82 citations98
US7276694B1Oct 2, 2007
Defect detection using energy spectrometer
KLA TENCOR TECH CORP45 citations92
US7253410B1Aug 7, 2007
Charge-control pre-scanning for e-beam imaging
KLA TENCOR TECH CORP49 citations92
US7394069B1Jul 1, 2008
Large-field scanning of charged particles
KLA TENCOR TECH CORP7 citations73
US7176468B2Feb 13, 2007
Method for charging substrate to a potential
KLA TENCOR TECH CORP7 citations73
US6822246B2Nov 23, 2004
Ribbon electron beam for inspection system
KLA TENCOR TECH CORP7 citations73
US7019292B1Mar 28, 2006
E-beam detection of defective contacts/vias with flooding and energy filter
KLA TENCOR TECH CORP7 citations72
US7507959B2Mar 24, 2009
Method for charging substrate to a potential
KLA TENCOR TECH CORP3 citations62
US7391034B1Jun 24, 2008
Electron imaging beam with reduced space charge defocusing
KLA TENCOR TECH CORP1 citations52