Inventor

RUBIN LEONARD M

US2 patents

Patents

2 patents

US6984832B2Jan 10, 2006

Beam angle control in a batch ion implantation system

AXCELIS TECH INC5 citations53

US7728293B2Jun 1, 2010

Structures and methods for measuring beam angle in an ion implanter

AXCELIS TECH INC0 citations41