Inventor
TSUJI HIROMITSU
JP7 patents
⚠️ This page may combine multiple inventors who share the name “TSUJI HIROMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
5 patentsUS7264918B2Sep 4, 2007
Resist composition for liquid immersion exposure process and method of forming resist pattern therewith
TOKYO OHKA KOGYO CO LTD69 citations97
US7592122B2Sep 22, 2009
Photoresist composition, and low-molecular compound and high-molecular compound for the photoresist composition
TOKYO OHKA KOGYO CO LTD3 citations62
US7326512B2Feb 5, 2008
Polymer compound, resist composition and dissolution inhibitor agent containing the polymer compound
TOKYO OHKA KOGYO CO LTD4 citations62
US7924400B2Apr 12, 2011
Method for measuring liquid immersion lithography soluble fraction in organic film
TOKYO OHKA KOGYO CO LTD0 citations46
US7700257B2Apr 20, 2010
Photoresist composition and resist pattern formation method by the use thereof
TOKYO OHKA KOGYO CO LTD0 citations41