Inventor
FREYTSIS AVRUM
US13 patents
⚠️ This page may combine multiple inventors who share the name “FREYTSIS AVRUM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN ASSOCIATES
4 patentsUS4899059AFeb 6, 1990
Disk scanning apparatus for batch ion implanters
VARIAN ASSOCIATES55 citations95
US5350427ASep 27, 1994
Wafer retaining platen having peripheral clamp and wafer lifting means
VARIAN ASSOCIATES23 citations92
US4620738ANov 4, 1986
Vacuum pick for semiconductor wafers
VARIAN ASSOCIATES48 citations92
US4965862AOct 23, 1990
Disk scanning apparatus for batch ion implanters
VARIAN ASSOCIATES17 citations66
TEL EPION INC
4 patentsUS7608843B2Oct 27, 2009
Method and apparatus for scanning a workpiece through an ion beam
TEL EPION INC10 citations82
US9305746B2Apr 5, 2016
Pre-aligned nozzle/skimmer
TEL EPION INC2 citations61
US9029808B2May 12, 2015
Low contamination scanner for GCIB system
TEL EPION INC3 citations59
US9343259B2May 17, 2016
GCIB nozzle assembly
TEL EPION INC0 citations40
TABAT MARTIN D
3 patentsUS8097860B2Jan 17, 2012
Multiple nozzle gas cluster ion beam processing system and method of operating
TABAT MARTIN D13 citations82
US8981322B2Mar 17, 2015
Multiple nozzle gas cluster ion beam system
TABAT MARTIN D2 citations61
US8304033B2Nov 6, 2012
Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles
TABAT MARTIN D3 citations61