Inventor
EDER ROBERT
DE5 patents
⚠️ This page may combine multiple inventors who share the name “EDER ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
3 patentsUS9280058B2Mar 8, 2016
Projection objective for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations60
US9977338B2May 22, 2018
Projection objective for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations49
US9588445B2Mar 7, 2017
Projection objective for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations49