Inventor

MICHELT BERTHOLD

DE5 patents

⚠️ This page may combine multiple inventors who share the name “MICHELT BERTHOLD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PRECITEC OPTRONIK GMBH

3 patents

US9982994B2May 29, 2018

Optical measuring method and measuring device having a measuring head for capturing a surface topography by calibrating the orientation of the measuring head

PRECITEC OPTRONIK GMBH7 citations80

US9677871B2Jun 13, 2017

Optical measuring method and measuring device having a measuring head for capturing a surface topography by calibrating the orientation of the measuring head

PRECITEC OPTRONIK GMBH10 citations80

US9500471B2Nov 22, 2016

Optical measuring device and method for acquiring in situ a stage height between a support and an edge region of an object

PRECITEC OPTRONIK GMBH11 citations79

SCHÖNLEBER MARTIN

1 patent

US9494409B2Nov 15, 2016

Test device for testing a bonding layer between wafer-shaped samples and test process for testing the bonding layer

SCHÖNLEBER MARTIN15 citations80

DUSEMUND CLAUS

1 patent

US8716039B2May 6, 2014

Monitoring apparatus and method for in-situ measurement of wafer thicknesses for monitoring the thinning of semiconductor wafers and thinning apparatus comprising a wet etching apparatus and a monitoring apparatus

DUSEMUND CLAUS9 citations76