Inventor
KUNKEL MATTHIAS
DE3 patents
Patents
3 patentsUS9982994B2May 29, 2018
Optical measuring method and measuring device having a measuring head for capturing a surface topography by calibrating the orientation of the measuring head
PRECITEC OPTRONIK GMBH7 citations80
US9677871B2Jun 13, 2017
Optical measuring method and measuring device having a measuring head for capturing a surface topography by calibrating the orientation of the measuring head
PRECITEC OPTRONIK GMBH10 citations80
US9500471B2Nov 22, 2016
Optical measuring device and method for acquiring in situ a stage height between a support and an edge region of an object
PRECITEC OPTRONIK GMBH11 citations79