Inventor
MONROY Gonzalo
US6 patents
Patents
6 patentsUS10707086B2Jul 7, 2020
Etching methods
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Methods and apparatus for processing a substrate
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Diamond like carbon layer formed by an electron beam plasma process
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US11043387B2Jun 22, 2021
Methods and apparatus for processing a substrate
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US11043375B2Jun 22, 2021
Plasma deposition of carbon hardmask
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US10790153B2Sep 29, 2020
Methods and apparatus for electron beam etching process
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