Inventor

CHEN LUCY ZHIPING

US3 patents

Patents

3 patents

US10707086B2Jul 7, 2020

Etching methods

APPLIED MATERIALS INC40 citations93

US11043375B2Jun 22, 2021

Plasma deposition of carbon hardmask

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US10790153B2Sep 29, 2020

Methods and apparatus for electron beam etching process

APPLIED MATERIALS INC0 citations51