Inventor
VENSELAAR JOANNES JITSE
NL4 patents
Patents
4 patentsUS11604419B2Mar 14, 2023
Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
ASML NETHERLANDS BV0 citations57
US11022897B2Jun 1, 2021
Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
ASML NETHERLANDS BV0 citations57
US10585048B2Mar 10, 2020
Method of determining a value of a parameter of interest of a target formed by a patterning process
ASML NETHERLANDS BV0 citations36
US10585354B2Mar 10, 2020
Method of optimizing a metrology process
ASML NETHERLANDS BV0 citations35