Inventor
WEISS NICOLAS MAURICIO
NL3 patents
Patents
3 patentsUS11604419B2Mar 14, 2023
Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
ASML NETHERLANDS BV0 citations57
US11022897B2Jun 1, 2021
Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
ASML NETHERLANDS BV0 citations57
US10705430B2Jul 7, 2020
Method of measuring a parameter of interest, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV1 citations56