Inventor
ZAAL MARTIJN MARIA
NL6 patents
Patents
6 patentsUS10811323B2Oct 20, 2020
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV4 citations82
US10520830B2Dec 31, 2019
Method and device for determining adjustments to sensitivity parameters
ASML NETHERLANDS BV14 citations76
US11710668B2Jul 25, 2023
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV0 citations61
US11604419B2Mar 14, 2023
Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
ASML NETHERLANDS BV0 citations57
US11022897B2Jun 1, 2021
Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
ASML NETHERLANDS BV0 citations57
US10585354B2Mar 10, 2020
Method of optimizing a metrology process
ASML NETHERLANDS BV0 citations35