Inventor
MAEGAWA YUKIHIRO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “MAEGAWA YUKIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
4 patentsUS6864640B2Mar 8, 2005
Plasma processing method and apparatus thereof
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD7 citations72
US7406925B2Aug 5, 2008
Plasma processing method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD3 citations61
US6707253B2Mar 16, 2004
Matching circuit and plasma processing apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD2 citations59
US6830653B2Dec 14, 2004
Plasma processing method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD1 citations51
PANASONIC CORP
2 patentsUS7615406B2Nov 10, 2009
Electronic device package manufacturing method and electronic device package
PANASONIC CORP18 citations82
US7638888B2Dec 29, 2009
Semiconductor chip mounting substrate, semiconductor chip mounting body, semiconductor chip stacked module, and semiconductor chip mounting substrate manufacturing method
PANASONIC CORP2 citations61