Inventor
YOSHIDA YUKIFUMI
JP24 patents
Patents
24 patentsUS11413662B2Aug 16, 2022
Substrate cleaning apparatus and substrate cleaning method
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US11404292B2Aug 2, 2022
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD2 citations72
US11020776B2Jun 1, 2021
Substrate cleaning method and substrate cleaning apparatus
SCREEN HOLDINGS CO LTD3 citations72
US10720333B2Jul 21, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD2 citations72
US11543752B2Jan 3, 2023
Substrate processing method, substrate processing apparatus, and recipe selection method
SCREEN HOLDINGS CO LTD2 citations71
US11211241B2Dec 28, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD4 citations71
US11101147B2Aug 24, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD3 citations71
US10792712B2Oct 6, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD6 citations71
US10058900B2Aug 28, 2018
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD3 citations71
US12403500B2Sep 2, 2025
Substrate processing with polymer-containing liquid
SCREEN HOLDINGS CO LTD0 citations62
US11501984B2Nov 15, 2022
Substrate processing device and substrate processing method
SCREEN HOLDINGS CO LTD0 citations62
US11921426B2Mar 5, 2024
Substrate processing method, substrate processing apparatus, and recipe selection method
SCREEN HOLDINGS CO LTD0 citations61
US11901173B2Feb 13, 2024
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations61
US11710629B2Jul 25, 2023
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations61
US11342190B2May 24, 2022
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations61
US11260431B2Mar 1, 2022
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations61
US11094529B2Aug 17, 2021
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations61
US11872605B2Jan 16, 2024
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations60
US11517941B2Dec 6, 2022
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations60
US12551935B2Feb 17, 2026
Substrate processing method, substrate processing apparatus, and processing liquid
SCREEN HOLDINGS CO LTD0 citations51
US12269068B2Apr 8, 2025
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD0 citations51
US11919051B2Mar 5, 2024
Substrate cleaning apparatus and substrate cleaning method
SCREEN HOLDINGS CO LTD0 citations51
US10199231B2Feb 5, 2019
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations51
US12581891B2Mar 17, 2026
Substrate processing method, substrate processing device, and processing fluid
SCREEN HOLDINGS CO LTD0 citations41