Inventor
OTSUJI MASAYUKI
JP27 patents
⚠️ This page may combine multiple inventors who share the name “OTSUJI MASAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
25 patentsUS11769663B2Sep 26, 2023
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD5 citations74
US11417513B2Aug 16, 2022
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD3 citations73
US11328925B2May 10, 2022
Substrate drying method and substrate processing apparatus
SCREEN HOLDINGS CO LTD3 citations73
US11373860B2Jun 28, 2022
Method of restoring collapsed pattern, substrate processing method, and substrate processing device
SCREEN HOLDINGS CO LTD2 citations72
US11124869B2Sep 21, 2021
Substrate processing method, substrate processing apparatus and pre-drying processing liquid
SCREEN HOLDINGS CO LTD4 citations72
US11094524B2Aug 17, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD2 citations72
US9455134B2Sep 27, 2016
Substrate processing method
SCREEN HOLDINGS CO LTD3 citations72
US11101147B2Aug 24, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD3 citations71
US12159783B2Dec 3, 2024
Method of restoring collapsed pattern, substrate processing method, and substrate processing device
SCREEN HOLDINGS CO LTD0 citations62
US11851745B2Dec 26, 2023
Substrate processing method, substrate processing apparatus and pre-drying processing liquid
SCREEN HOLDINGS CO LTD1 citations62
US11443960B2Sep 13, 2022
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations62
US10886133B2Jan 5, 2021
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD1 citations61
US10615026B2Apr 7, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations60
US12576425B2Mar 17, 2026
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations51
US12557578B2Feb 17, 2026
Substrate processing method and sublimation drying processing agent
SCREEN HOLDINGS CO LTD0 citations51
US12362167B2Jul 15, 2025
Method for producing liquid containing sublimable substance, substrate drying method, and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations51
US11302525B2Apr 12, 2022
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations51
US11201067B2Dec 14, 2021
Substrate treatment method and substrate treatment device
SCREEN HOLDINGS CO LTD0 citations51
US11154913B2Oct 26, 2021
Substrate treatment method and substrate treatment device
SCREEN HOLDINGS CO LTD0 citations51
US11036139B2Jun 15, 2021
Sacrificial film forming method, substrate treatment method, and substrate treatment device
SCREEN HOLDINGS CO LTD0 citations51
US10935825B2Mar 2, 2021
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations51
US10900127B2Jan 26, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations51
US10854477B2Dec 1, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations51
US10549322B2Feb 4, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations41
US10816141B2Oct 27, 2020
Chemical solution feeder, substrate treatment apparatus, method for feeding chemical solution, and method for treating substrate
SCREEN HOLDINGS CO LTD0 citations37