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Inventor
MAEDA CHIKARA
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “MAEDA CHIKARA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
2 patents
US11101147B2
Aug 24, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD
3 citations
71
US11302525B2
Apr 12, 2022
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD
0 citations
51
DAIKIN IND LTD
2 patents
US10530154B2
Jan 7, 2020
Control apparatus
DAIKIN IND LTD
1 citations
55
US10074980B2
Sep 11, 2018
Control apparatus
DAIKIN IND LTD
1 citations
44