Inventor
ARAI TOSHINARI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “ARAI TOSHINARI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
V TECHNOLOGY CO LTD
4 patentsUS9244311B2Jan 26, 2016
Photo-alignment exposure method and photo-alignment exposure device
V TECHNOLOGY CO LTD0 citations50
US9360776B2Jun 7, 2016
Alignment correction method for substrate to be exposed, and exposure apparatus
V TECHNOLOGY CO LTD1 citations49
US8922752B2Dec 30, 2014
Method and apparatus for alignment processing
V TECHNOLOGY CO LTD0 citations40
US9207498B2Dec 8, 2015
Photo-alignment exposure device and photo-alignment exposure method
V TECHNOLOGY CO LTD0 citations39
V TECH CO LTD
4 patentsUS12555739B2Feb 17, 2026
Differential pumping apparatus and focused charged particle beam system
V TECH CO LTD0 citations47
US12537164B2Jan 27, 2026
Process apparatus including differential pumping device and focused ion beam column
V TECH CO LTD0 citations47
US12444567B2Oct 14, 2025
Focused charged particle beam apparatus
V TECH CO LTD0 citations47
US10469692B2Nov 5, 2019
Scanning exposure device
V TECH CO LTD0 citations47