Inventor
TAKESHITA TAKURO
JP3 patents
Patents
3 patentsUS12555739B2Feb 17, 2026
Differential pumping apparatus and focused charged particle beam system
V TECH CO LTD0 citations47
US12537164B2Jan 27, 2026
Process apparatus including differential pumping device and focused ion beam column
V TECH CO LTD0 citations47
US12444567B2Oct 14, 2025
Focused charged particle beam apparatus
V TECH CO LTD0 citations47