Inventor
TSUDA MINORU
5 patents
Patents
5 patentsUS4590149AMay 20, 1986
Method for fine pattern formation on a photoresist
TOKYO OHKA KOGYO CO LTD35 citations90
US4243740AJan 6, 1981
Light sensitive compositions of polymethyl isopropenyl ketone
TOKYO OHKA KOGYO CO LTD9 citations73
US4297433AOct 27, 1981
Light sensitive compositions of polymethyl isopropenyl ketone
TOKYO OHKA KOGYO CO LTD9 citations72
US4276369AJun 30, 1981
Photo--imaging a polymethyl isopropenyl ketone (PMIPK) composition
TOKYO OHKA KOGYO CO LTD5 citations72
US4401745AAug 30, 1983
Composition and process for ultra-fine pattern formation
TOKYO OHKA KOGYO CO LTD16 citations71